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Xenon Gas (Xe) 99.9995% (5N5)

CAS NO. 7440-63-3
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  • Xe 5N5, Assay ≥99.9995%

  • Royalchem

  • 7440-63-3

Product Name High-Purity Xenon Gas (Xe) 99.9995%
Purity Grade: 5N5 Ultra-High Purity
Product Form: Compressed Gas
CAS Number 7440-63-3
Symbol and Atomic Number Xe; Atomic Number 54
Molar Mass 131.293 g/mol
Product Image High-purity Xenon gas Xe 99.9995 percent CAS 7440-63-3
Typical Purity Specification Xenon Assay: ≥99.9995%
Hydrogen (H2): ≤0.2 ppm
Oxygen + Argon (O2 + Ar): ≤1.0 ppm
Nitrogen (N2): ≤2.0 ppm
Carbon Monoxide (CO): ≤0.1 ppm
Carbon Dioxide (CO2): ≤0.05 ppm
Methane (CH4): ≤0.05 ppm
Krypton (Kr): ≤0.05 ppm
Moisture (H2O): ≤1.0 ppm
Nitrous Oxide (N2O): ≤0.05 ppm
Hexafluoroethane (C2F6): ≤0.1 ppm
Reference Physical Properties Appearance: Colorless, odorless gas
Chemical Characteristics: Inert, nonflammable noble gas
Boiling Point: Approximately −108.1°C
Relative Characteristics: Heavier than air and may accumulate in confined or low-lying areas
Key Applications Semiconductor and Electronics: Used in selected high-aspect-ratio plasma etching and other specialized plasma processes where gas purity and trace impurities require close control. Suitability depends on the equipment, process recipe, and impurity specification.
Lighting and Photonics: Used in high-intensity discharge lamps, automotive and aviation lighting, photographic flash lamps, ultraviolet light sources, and selected excimer-laser gas systems.
Spacecraft Ion Propulsion: Used as a propellant in satellite ion thrusters and Hall-effect thrusters because of its high atomic mass and favorable ionization characteristics.
Research Applications: Used in high-energy physics, dark-matter detection, spectroscopy, and other research systems requiring high-purity noble gases.
Packaging and Supply Confirmation Supplied in cylinders suitable for high-pressure gas service and the applicable transport requirements. Cylinder water capacity, fill quantity, filling pressure, valve connection, cylinder material, return arrangement, and available quantity are subject to the quotation, order, and actual supply plan. Please provide the destination, end use, and required valve standard when requesting a quotation.
Storage and Handling Xenon is nonflammable, but a high-concentration release can displace oxygen and cause asphyxiation. Secure cylinders upright, keep valve-protection devices in place, and store in a cool, dry, well-ventilated area away from heat and direct sunlight. Use pressure-control and piping equipment rated for the cylinder pressure and install backflow prevention where appropriate. Test oxygen levels before entering any area where oxygen deficiency may be present.
Transport Information Common transport classification: UN 2036; Proper Shipping Name: Xenon, compressed; Hazard Class 2.2, nonflammable and non-poisonous gas; no packing group normally assigned. Final shipping name, labels, cylinder requirements, and declarations must be confirmed against the SDS for the supplied batch, filling condition, packaging, transport mode, route, and destination regulations.
Sourcing 5N5 High-Purity Xenon?Tell us your application, target purity, critical impurity limits, quantity per order, annual demand, cylinder capacity, fill quantity or pressure, valve connection, destination, and end use. Royalchem can provide the available batch-specific COA, SDS, specification confirmation, and dangerous-goods transport documentation to support product selection and supply evaluation.
Application and Purchasing Considerations
Application Primary Function Items to Confirm
Semiconductor and Plasma Processes Process gas or plasma source Assay, H2, H2O, O2 + Ar, N2, CO, CO2, CH4, Kr, N2O, C2F6, analytical methods, and lot-to-lot consistency
Lighting and Lasers Discharge, illumination, or laser gas system Purity, gas-mixture requirements, fill pressure, valve connection, and equipment compatibility
Spacecraft Ion Propulsion Propellant for ion or Hall-effect thrusters Critical trace impurities, continuity of supply, batch traceability, packaging, and long-term demand plan
Research and Detection Detection medium, experimental gas, or related research use Isotope requirements, background impurities, analytical certificate, residual cylinder pressure, and cylinder return
Frequently Asked Questions
What does 99.9995% xenon mean? A purity of 99.9995% is commonly described as 5N5 grade. It means the xenon assay is at least 99.9995% under the specified analytical method. Suitability for a process also depends on individual trace-impurity limits, test methods, and the COA for the supplied batch.
What is the molar mass of xenon? The standard atomic weight and molar mass of naturally occurring xenon are approximately 131.293 g/mol.
Is xenon flammable or toxic? Xenon is a nonflammable, chemically inert noble gas. Its principal hazards are cylinder pressure and oxygen displacement. A high-concentration release can create an oxygen-deficient atmosphere and cause asphyxiation.
Which industries use high-purity xenon? High-purity xenon is used in selected semiconductor plasma processes, high-intensity lighting, excimer-laser systems, spacecraft ion propulsion, high-energy physics, and dark-matter detection. Required purity and impurity limits vary by equipment and process.
Can industrial 5N5 xenon be used directly for medical applications? Not on purity alone. Clinical or medical use requires a qualified medical-grade specification, appropriate quality systems and authorization, suitable packaging, and compliance with destination-market regulations. This page presents an industrial and research supply specification.
How is compressed xenon transported? Compressed xenon is commonly shipped as UN 2036, Hazard Class 2.2. Cylinders must be secured and fitted with appropriate valve protection. Actual documentation must follow the batch SDS, cylinder and fill condition, transport mode, route, and destination regulations.
What information should be included in an inquiry? Please provide the application, target purity, critical impurity limits, order and annual quantity, cylinder and valve requirements, destination, end use, and required documents so that the suitable specification, packaging, and shipping plan can be evaluated.
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